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商品説明
概要 The 10898D 2-axis high-resolution laser axis board provides the same resolution as the Keysight 10897D high-resolution laser axis board with increased slew rates and reduced noise. The increased stage velocity limits and low noise compared to previous laser systems offer premium positioning repeatability and accuracy for advanced applications such as IC fabrication equipment.
商品スペック
＞＞もっと見る主な特長と仕様
General
【 Number of axes per board】 2
【 Maximum number of boards per system】 7 (consult Keysight for larger board groups)
36-bit 2's complement
Resolution up to 0.3 nm with high resolution optics
【 Max linear interferometer velocity (must use E1709A receiver)】 2.2 m/s
Operation with plane mirror optics
【 Resolution】 0.6 nm
【 Working range】 ± 10.6 m
Timing
【 Position update rate】 10 MHz
【 Data rate over backplane】 > 100 kHz
【 Multi-board sync 】 ± 2 ns
Special features
Flexible Hardware IO
Easy and Programmable routing of Ref and Meas signals for multi-axis systems
Essentially two enhanced 10897D axes on one 6U board
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