概要 The 10897D High-resolution VMEbus laser axis board provides excellent resolution of up to 0.3 nm with a high resolution interferometer. The data age uncertainty is dramatically reduced allowing extremely accurate measurement and control of moving systems.
The very high data rates accommodate high-bandwidth and high-performance closed-loop applications. Configured with appropriate lasers and optics components, the 10897D supplies unsurpassed positioning accuracy for dynamic measurement.